Abstract: The SiC coatings was characterized by the AFM, SEM, and the effect of different temperature on the surface morphology of the coating was disscussed. The structure of SiC coating was analyzed by XRD. The results show that the roughness of SiC coating decreased first and then increased with increasing of the annealing temperature from 400℃ to 800℃, the minimum surface roughness 0.122 μm was got at 600℃; When the annealing temperature was lower than 600℃, SiC coating does not appear crystal transition; When the annealing temperature was higher than 700℃, the amorphous coating turned to crystal coating, the corresponding diffraction peaks of SiC appeared in XRD diffraction pattern after annealing at 700℃, and with the increase of annealing temperature, the crystallization degree of the coating is further increased.