Abstract: TiO₂ flms were prepared by the sol – gel method using spin-coating process with n-butyl titanate, acetic acid, acetylacetone, ethanol, deionized water as raw material.The process parameters for obtaining continuous and uniform TiO₂ thin films include the speed of spin-coating at 3000r /min, the pretreatment temperature at 80℃ (10min), the heating rate from room temperature to 200℃ at 0.5℃ /min and 3℃ /min at high-temperature.Crystalline films with anatase structure can be obtained after annealing at 500℃ and the crystallite size of TiO₂ film is in the range of 30-80 nm.